Business
Semiconductor, Analysis and Testing Equipment
We provide semiconductor manufacturing system for customer’s requirement.
As analytical & testing equipment manufacturer able for consistent support from design to production, we gain patronization from our customers.
Semiconductor and other Equipment
Metalorganic Chemical Vapor Deposition System
To pyrolyze the metalorganic chemical(III－V Group) compound and hydrogen compound in decompressed reaction furnace, a compound semiconductor crystal is epitaxially grown on substrate.
Low Pressure Chemical Vapor Deposition System
Polycrystalline silicon (SiN fill,Poly-Si film) or oxidized film is grown on substrate in decompressed reaction furnace.
Liquid Chemical Supply Equipment for Semiconductor Film Formation
The equipment is used for supplying liquid material of chemical reaction gas, which is necessary for semiconductor film formation. Various liquid chemical including organic material or corrosive material are available according to customer’s needs.
Analytical & Testing Equipment
Catalytic-related Equipment
Catalyst Evaluation Equipment
Be able to manufacture equipments according to various usage and application.
Quotation and documents can be provided based on specification of material gas or liquid, temperature, pressure, flow rate, analysis, automatic or manual control etc.
Automatic Catalytic Gas Absorption Measuring Equipment
Designed by pulse method, the equipment is available for automatic analyzing and data processing after sampling. Continuous measurement is possible for 4 or 6 samples.
Catalytic Gas Absorption Measuring Equipment
This is equipment to measure catalytic gas absorption amount by pulse method and provides analysis and data process after sampling (for 1 sample).
Compact Flow
This is compact catalyst reaction system installed with gas chromatography which is able for prompt analysis.
Software for Automatic Control of Catalyst Evaluation Equipment
It’s able to monitor various information including temperature, flow rate etc through operation screen of whole system.
Separation Membrane related Equipment
Membrane Evaluation Equipment
Membrane Evaluation Equipment can be produced in accordance with shape of membrane or application.
Fuel-cell Related Equipment
Small-scale Testing Equipment for Fuel-cell
Characteristics of fuel cell under various conditions can be tested by changing temperature, humidity and flow rate etc.