Back to Home
HEMMI Our Business
Business Information Case Study Environment Rent Business Slide Scale Topics Company Information
Semiconductors and Other Equipment
Metalorganic Chemical Vapor Deposition Equipment
Low Pressure Chemical Vapor Deposition Equipment
Horizontal Oxidation and Diffusion Furnace Systems
Liquid Dispensers for Semiconductor Coating
Horizontal Oxidation and Diffusion Furnace Systems
Forms an oxide film and diffusion layer
on a silicon wafer.
This horizontal oxidation and diffusion system uses advanced temperature control and material handling technologies for heat treatment process, realized by P-type or N-type doping agent diffusion or other methods.
Our systems cover a large range of applications, from laboratory use to mass production, to meet customers requirements.
Wafer size 150×157 ø8" ø6" ø5" ø4"
Diffusion furnace Model HD3002A HD3003A - HD2004A HD2003A -
Heater specifications Standard/max.
temperature
(°C)
800°C/
1050°C
1100°C/
1200°C
- 1250°C/
1250°C
1250°C/
1250°C
-
Heated length
(mm)
1100 900 - 900 900 -
Temperature control 3 zones 3 zones - 3 zones 3 zones -
External dimensions W×D×H 2320 × 900
× 2325
2320 × 900
× 2480
- 2180 × 900
× 2225
2180 × 900
× 2225
-
Chamber (stage) 2 3 - 4 3 -
Treated wafers/tube 240 60 - 125 125 -
Utilities Power supply 200V AC 140KVA 440V AC 160KVA - 200V AC 135KVA 200V AC 135KVA -
Cooling water 3 L/min/heater 12L/min/radiator
Furnace throat
scavenger
Model YH1102A YH1054E YH1054F YH1054B YH1054C YH1054D
Material SUS304, 316 with polished inner surface
Utilities Exhaust 6 L/min/heater
Cooling water 6-8L/min/heater 3kg/cm2
Clean bench Model Flow
direction
Horizontal - YH1039F YH1039B YH1039A - YH1039E
Down - - - - YH1090A -
Performance (dust collection efficiency) 99.97% with particles of 0.3μm diameter, 0.5m/s air velocity
Utilities Power supply 100 V 3KVA
Air-Vacuum Air: 1/4” Vacuum: 1/4”(Swegrock)
Automatic carrier device
controller
Model Wafer transfer - - - - - -
Boat elevator YH1135A - - - - -
Soft loader SL5300B SL8300B SL6300A SL5300A - -
Cantilever - - - - - SL4200D
Boat loader - - - YH1036A YH1036A -
Tray station - - - YH1035B YH1086A -
Auto door YH1045F YH1045G YH1045H YH1045B YH1045B YH1045E
Auto cap YH1055E YH1055H - YH1055C YH1055C YH1055D
Source
cabinet
Model YH1079B YH1079C - YH1079A - -
Utilities Power supply 100V AC 3KVA
Exhaust 2 L/min
Cooling water None
Direct
scavenger
Model - YH1084B YH1084E - - -
Material SUS304, 316 with polished inner surface
Utilities Exhaust 6 L/min
Cooling water None
Gas
system
Model YH1093A05 YH1039A08 - - - -
Gas N2-O2-POCL3 N2-O2 - - - -
MFC STEC OEC-HEMMI - - - -
Pipe SUS316L-EP Teflon
Special specification
option
TC-storage box *1 *1 *1 *1 *1 *1
SL-speed setter *1 *1 *1 *1 *1 *1
Return to previous page
Move to top of page
Hemmi Slide Rule Co., Ltd Privacy policy Site map Enquiries