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Fluid Control Equipment - Valves
Valves
Mass Flow Products
Pumps
Pressure control valves
Metal diaphragm pressure reducing valve
RD2210A series
- Doping , epitaxial deposition and other semiconductor manufacturing processes
- A wide range of chemical analyses
- Specialty, high-purity and corrosive gas
- Metal joint sealing between the diaphragm and the unit
- He leak check on all products
- No oil, no water cleaning
- High and low pressure types available
- Panel and bottom mounting possible
Specifications
Model
RD2210A1010
RD2210A4020
Pressure resistance
24.5 MPa
2.94 MPa
Operating primary pressure
Max 14.7MPa
Max 1.96MPa
Set pressure
17.15-2058kPa each type
17.15-686kPa each type
Effective orifice diameter
ø0.7
ø2
Cv value
0.015
0.1
Primary pressure characteristics
0.5%
1.3%
Repeatability
0.98kPa
Hysteresis
3.92kPa
External leakage
1×10-10Pa•m3/s (He) or less
Internal leakage
1×10-8Pa•m3/s (He) or less
Gas contact material
SUS316, SUS316L, PCTFE
Operating temperature
-10 - +80°C
Ports (number)
60° IN (2), OUT (2)
90° IN (1), OUT (2)
Connection
NPT 1/4 standard
Weight
920g
Panel cut-out
ø33
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