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Fluid Control Equipment - Mass Flow Products
Valves
Mass Flow Products
Pumps
Digital and mass flow controller
HM5500A series
- General manufacturing processes
- A wide range of chemical analyses
- Research and development of new materials
- Digital control system
- Large flow range from 5 SCCM to 400 SLM
- Increased reliability and advanced miniaturization through the use of hybrid IC
- Communication function
Specifications
■Mass flow controller
Category High performance
Model HM5541A HM5542A HM5543A
Flow
(standard range)
5/10/20/30/50/
100/200/300/
500/1000
SCCM
2/3/5/10/
20SLM
30/50/
100/200
SLM
400 SLM
Accuracy ±1% S.P. (25-100%)
±0.25% F.S. (<25%)
±2% (50-100%)
±1% (<50%)
Linearity ±0.5% F.S.
Repeatability ±0.2%
Control range 2 to 100% of span
Response Less than 1 sec. for ±2% of the set value
Max operating pressure 970kPa
Pressure resistance 1470kPa
Operating differential pressure 34.3 - 274.4kPa : 5SCCM - 5SLM
68.6 - 274.4kPa : 10SLM - 200SLM
107.8 - 274.4kPa : 400SLM     
Leakage standard 1×10-9Pa•m3/s (He) or less
Set signal 0.1-5V DC
Output signal 0-5V DC
Operating temperature 5-45°C (same for gas temperature)
Gas contact material SUS316 Viton® Teflon
Joint Standard: Swagelok® 1/4”(5SCCM-20SLM)
3/8”(30-100SLM), 1/2”(200-400SLM)
Installation position Free (±0.5% of span)
Weight 750g 3kg 3.7kg
Driving power ±15V DC
Power consumption 6 W or less 8 W or less
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