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Fluid Control Equipment - Mass Flow Products
Valves
Mass Flow Products
Pumps
Mass flow controller
HM5300 series
- General manufacturing processes
- A wide range of chemical analyses
- Research and development of new materials
- Power supply: 24V single power supply
- Flow output: 4-20mA DC (standard)
  Option
- Communication function: RS-485 or RS-232C
Specifications
Model
HM5372A
HM5341A
HM5342A
HM5343A
Flow
(standard range)
30 SLM - 200SLM
5 SCCM - 20SLM
30 SLM - 200SLM
400 SLM
Accuracy*1
±2% of F.S
±1% of F.S
±2% of F.S
Linearity
±1% of F.S
±0.5% of F.S
±1% of F.S
Repeatability
±0.4% of F.S
±0.2% of F.S
±0.4% of F.S
Control range
2 to 100% of span
Response
Less than 3 sec. to reach ±2% of set full scale
Max operating pressure
970kPa (G)
Pressure resistance
1470kPa (G)
Operating differential pressure
34.3 - 274.4kPa : 5SCCM - 5SLM
68.6 - 274.4kPa : 10SLM - 200SLM
Leakage standard
1×10−9Pa•m3/s (He) or less
Set signal
1.08-5V DC (option: 4.32-20mA)
Output signal
4-20mA/550Ω max (option: 1-5V DC)
Operating temperature
0-45°C (same for gas temperature)
Temperature characteristics*2
±0.2% F.S/°C or less
±0.1% F.S/°C or less
Gas contact material
SUS316, Viton, Teflon
Joint
Standard: Swagelok
1/4”: 5SCCM-20SLM, 3/8”: 30SLM-100SLM, 1/2”: 200SLM-400SLM
Installation position
Free (±0.5% of span)
Weight
3.2kg
790g
3.2kg
3.6kg
Power supply
24 V DC +5%, −10%
Power consumption*5
8 W or less
5 W or less
8 W or less
8 W or less
External dimensions
(D×W×H)
*3
138×50×130.5
196×50×174.1
75.4×25×118.6
126.8×25×162.2
138×50×130.5
196×50×174.1
141×50×140.5
204.6×50×184.1
Forced valve control
24 V connection: Valve open, 0V connection: Valve close
Soft start
function*4
Option (module)
Connector (electric)
D-sub (9P)
*1
- Difference between set value and actual flow value
- Ambient temperature: 25°C ±1°C
*2
Variation in actual flow value at 5-45°C
*3
Upper side: joints and connectors not included. Lower side: joints and connectors included.
*4
Communication specification units excluded.
*5
Around 1W increase with communication specification units.
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